This article presents a 2D measurement system using Hall effect sensor array for micro robotic applications. This system uses a trilateration method to track a microrobot equipped with a permanent magnet. The objective of this work is to characterize the impact of different physical parameters (i.e., sensors density, number of measurements, etc.) on the localization errors. The simulation and experimental results have shown a good correlation for the measurement system. The tracking trajectory of a mobile permanent magnet in xy-plane was successfully measured with a mean error of 43.9 ± 27.8 μm and of 47.5 ± 28.0 μm along x- and y-axis, respectively over a trajectory in a 3 × 3 mm2 workspace.